| 摘要 |
PURPOSE:To improve the certainty and the workability of a test by temporarily storing the result of the test of a plurality of optical devices formed on a wafer, and making an improper device on the basis of test ended wafer map data. CONSTITUTION:A test which is executed by emitting a light 12 to a wafer 11 and using a probe is performed under the circumstances that no marker exists, and the result is fed to a tester 13 to form a wafer map 14, and the map is filed in the tester 13. If all wavers of a certain back are all tested, the filed waver map is shifted to other storage medium such as a magnetic tape. The tester 13 can execute other test. The playing time of an expensive device can be shortened. Then, information of MT15 is read out by other marking exclusive tester 16, and the information read in the probe 17 is fed. Then, if there is F information in a certain device, the probe 17 delivers a signal to a marker 18 to mark the device. Thus, the certainty and the workability of the test can be effectively improved. |
