发明名称 PRODUCTION APPARATUS
摘要 PURPOSE:To shorten processes for products, to improve yield and to reduce the number of operators by forming a plurality of housing sections, disposing a stocker delivering materials to be treated between the stocker and a conveyor while being faced to a carrying path and controlling each treater, the conveyor, a shifter and the stocker by a controller. CONSTITUTION:A conveyor holding and carrying a plurality of works is arranged onto a carrying path, and controlled by a central controller and moved on the carrying path. The conveyor has wheels 36 in the lower section of a pedestal 35, and is controlled and shifted by radio. A work receiving arm 38 is mounted on the side from a machine body 37 on the pedestal 35, and works 39 carried out of a stocker 28 are placed on the arm 38 and the arm 38 supports the works. The stocker 28 consists of shelves 42 with a plurality of housing sections 41 housing works 39 and a transfer machine 43, which can freely be elevated or lowered and moved right and left, and the transfer machine 43 supplies the conveyor with works 39 by a command from the central controller or houses works in empty housing sections 41 in shelves 42.
申请公布号 JPS61123151(A) 申请公布日期 1986.06.11
申请号 JP19850235123 申请日期 1985.10.23
申请人 HITACHI LTD 发明人 NAGATOMO HIROTO;MAEJIMA HIROSHI;SUZUKI JUN;FUJIKAWA YOSHIYUKI
分类号 B65G43/00;B65G49/07;H01L21/00;H01L21/67;H01L21/677;H01L21/68 主分类号 B65G43/00
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