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发明名称
OPTICAL PROJECTION
摘要
申请公布号
GB2124397(B)
申请公布日期
1986.06.11
申请号
GB19820036420
申请日期
1982.12.22
申请人
* CANON KABUSHIKI KAISHA
发明人
MINORU * YOMODA;IZUMI * TSUKAMOTO
分类号
G03F9/00;G03F9/02;H01L21/027;H01L21/30;(IPC1-7):G03B27/68
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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