| 摘要 |
PURPOSE:To attach a sheet for adhesion of wafers under the uniform elongating condition by pressing and fixing the peripheral part of sheet with a sheet holding member, pressing and bonding the sheet to the sheet attaching surface of a carrier jig with a piston and cutting the sheet in the vicinity of piston. CONSTITUTION:A carrier jig 7 is inserted into a groove 15 of carrier holder 13 from the front side and then it is positioned. Thereafter, a cylinder 20 is operated in order to move a sheet holding member 19 to the lower side. Thereby, the sheet holding member 19 is pressed and fixed to the periphery of a hole 14 of sheet 9 at the surface of carrier holder 13. Next, the cylinder 22 is operated to move the piston 21 downward and while the sheet 9 is extended downward, it is deformed and is pressed and fixed to the sheet attaching surface 11. Thereafter, an arm 24 is rotated and the sheet is cut along the periphery of a piston 21 with a cutter 25. After the cutting, the piston 21 and sheet holding member 19 is moved upward and the carrier jig 7 is drawn from the carrier holder 13, thus completing the attachment of sheet. |
