发明名称 MEASURING METHOD OF LIGHT ABSORPTION CHARACTERISTIC OF THIN FILM
摘要 PURPOSE:To detect light absorption characteristics of a thin film by irradiating a thin film expanded on a liquid surface with exciting light and reflecting it totally, passing probe light nearby the irradiation point, and detecting the quantity of polarization. CONSTITUTION:The thin monolayer film 4 is expanded on the liquid surface 3 in a liquid tank 1. The exciting light 11 from an exciting light source 10 is made incident on the liquid side and reflected totally by the thin film 4. Then, the probe light 6 from a probe light source 5 is passed in parallel to the liquid surface 3 right below the liquid surface. At this time, the thin film 4 is irradiated with the exciting light 11 to absorb its energy and then varies in refractive index. The probe light 6 is polarized nearby the thin film irradiated with the exciting light 11 and a detector 7 detects the quantity of the polarization. Thus, the exciting light is irradiated from the liquid side, so the influence of powdery dust and a flicker when the light is irradiated through air is eliminated to detect the light absorption characteristics of the thin film with good sensitivity and high accuracy.
申请公布号 JPS61122545(A) 申请公布日期 1986.06.10
申请号 JP19840243183 申请日期 1984.11.20
申请人 CANON INC 发明人 SAITO KENJI;NISHIMURA YUKIO;TOMITA YOSHINORI;KAWADA HARUKI;EGUCHI TAKESHI;NAKAGIRI TAKASHI
分类号 G01N21/00;G01N21/17;G01N21/41;G01N21/84;G01N29/00 主分类号 G01N21/00
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