发明名称 Indium doped gallium arsenide crystals and method of preparation
摘要 A method of fabrication of low dislocation single crystal indium-doped gallium arsenide, and improved crystal structure. The method is an improved liquid encapsulant Czochralski process with an indium doping level of 5x1019 to 3x1020 indium atoms per cubic centimeter incorporated into the large diameter, long single crystal. The initial melt of elemental indium, gallium, and arsenic contain about 1 atom percent of indium, and inclusion of the indium permits high yield growth of crystals with desired near stoichiometric or slightly arsenic rich composition which exhibit the desired electrical characteristics.
申请公布号 US4594173(A) 申请公布日期 1986.06.10
申请号 US19840602236 申请日期 1984.04.19
申请人 WESTINGHOUSE ELECTRIC CORP. 发明人 HOBGOOD, HUDSON M.;THOMAS, RICHARD N.;BARRETT, DONOVAN L.
分类号 C30B15/00;(IPC1-7):C30B15/04;H01L29/14 主分类号 C30B15/00
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