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发明名称
MICROWAVE EXCITED HELIUM PLASMA BEAM ION DETECTOR
摘要
申请公布号
JPS61122561(A)
申请公布日期
1986.06.10
申请号
JP19850247306
申请日期
1985.11.06
申请人
VARIAN ASSOC INC
发明人
GUREGORII JIEI UERUZU
分类号
G01N27/64;G01N27/66;G01N30/64
主分类号
G01N27/64
代理机构
代理人
主权项
地址
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