| 摘要 |
PURPOSE:To keep a bench space clean and dry all the time, by providing a dry air of which dew point is below 4 deg.C to the bench, by dividing an air circulation passage on the upstream side of a HEPA filter into a plurality of branch passages, by installing an air cooler in each branch passage, and by changeably operating the air coolers in both passages. CONSTITUTION:A bench space 2 and an air circulation passage 3 are provided in the clean chamber of a movable casing body 1. A HEPA filter 4 is provided in the air circulation passage 3, and clean air is diffused toward the bench space 2 through the filter 4. An air heater 5 is installed in the air circulation passage 3 on the upstream side of a filter 4, and the part of an air circulation passage 3 on the upstream side of an air heater 5 is divided into a plurality of branch passages. An air cooler 6 is installed in each branch passage, and dry air of which dew point is below 4 deg.C can be obtained by changeably operating those two air coolers 6.
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