| 摘要 |
<p>PURPOSE:To facilitate the positioning of a probe guard, by fitting a reference pin of a support frame into a reference pin insertion hole of a guard body mounting plate. CONSTITUTION:To remove a probe guard 1 from a support frame 10, which is moved to the position off a scan optical system unit and after a nut 12 is loosened and removed, the support frame is lifted with a handle 8. In the mounting of the probe guard 1, a reference pin 11 of the support frame 10 is fitted into a reference pin insertion hole 7 of a guard body mounting plate 2, the plate 2 is placed on the support frame 10 and the nut 12 is screwed down with the reference pin 11. In this manner, the fitting of the reference pin 11 into the reference pin insertion hole 7 permits the position of the probe 17 to be determined accurately with respect to the measuring location of an electronic circuit thereby enabling quick and simple exchange of the probe guard 1.</p> |
