摘要 |
PURPOSE:To elevate the measuring accuracy, by providing a reflectance varying mirror adapted to introduce a laser light to a spectrophotometer through the reflection with a half-transmission mirror to obtain only the raman spectrum from the result of irradiation of a sample with the laser light and the result of reflection thereof with the varying mirror. CONSTITUTION:A reflectance varying mirror 17 is provided to reflect a laser light 2 passing through a half-transmission mirror 5 to a laser raman microprobe comprising a laser light source 1, lenses 4 and 11, the half-transmission mirror 5, a spectrophotometer 12, a multichannel detector 14 and the like. A raman light 8 generated as the laser light 2 bent with the half-transmission mirror 5 incident into a sample 7 is detected together with the reflected laser 9 by a detector 14 via a spectrophotometer 12 and the raman spectrum overlapped with an astray light background is memorized into a memory 16. Then, the position of the sample 7 is shifted and the spectrum by the reflected laser light from the varying mirror 17 is detected to remove the astray light background by computation with display/arithmetic unit 15 thereby providing a raman spectrum with a high accuracy. |