| 摘要 |
PURPOSE:To lead plane beam of metal ion with good uniformity by providing a lead electrode which has a plurality of apertures arranged like a plane and extracts the plane beam of metal ion from arc chamber. CONSTITUTION:An arc voltage is applied across a filament 3 and target 6 of solid metal with an arc power source not shown in order to generate the arc 14. The plasma mixing the metal ion 15 generated when the target 6 is locally vaporized by the arc spot and a gas ion 16 generated when the gas introduced is ionized is generated within the arc chamber 1 and said plasma spreads into the arc chamber 1. When a high voltage is applied to a lead electrode 7 by the lead power supply not shown, the plane beam mixing the metal ion beam 17 and gas ion beam 18 is extracted through a plurality of apertures 7a of the electrode 7. |
