发明名称 APPARATUS FOR MANUFACTURING SEMICONDUCTOR
摘要 PURPOSE:To improve the working efficiency and productivity of each apparatus, by providing a receiving unit and a supplying unit at the ends of a conveying path, respectively, and providing a unit for temporarily storing products in an intermediate position between those apparatuses. CONSTITUTION:A lead frame is fed by a pin 3-3 from a magazine 3-2 set on an elevator 3-1 and die bonded by a die bonding apparatus M1 at a predetermined position. The lead frame is further fed to a magazine 3-8 or 3-7 set on an elevator 3-6 in an intermediate position between the apparatus M1 and a wire bonding apparatus M2. If no preceding lead frame is present on a conveying rail 3-10, the lead frame presently fed is passed through the magazine so that wires are connected thereto by the apparatus M2 and the lead frame is received in a magazine 3-14 of a storing unit M5. If a preceding lead frame is present on the rail, however, the lead frame presently fed is received in the magazine case 3-8 and temporarily stored by the pitch operation of the elevator 3-6. According to this construction, in which the apparatuses having different functions and different working speeds are connected by means of an intermediate unit provided continuously therewith and having a storing mechanism with a certain capacity, the working efficiency and productivity of each apparatus can be improved and further the floor area can be reduced.
申请公布号 JPS61120429(A) 申请公布日期 1986.06.07
申请号 JP19840242110 申请日期 1984.11.16
申请人 NEC CORP 发明人 YAMAGUCHI KOJI
分类号 H01L21/50;(IPC1-7):H01L21/50 主分类号 H01L21/50
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