| 摘要 |
PURPOSE:To obtain the titled tilt angle controller which has superior durability and high precision by detecting the tilt angle of a body to be controlled with a laser light beam without contacting the objective body. CONSTITUTION:The tilt angle controller consists of a pedestal part 1 where the body to be controlled is fitted, a laser light irradiation part 2 installed on the pedestal surface, and a laser light photodetection part 3 having plural photosensors 5 arrayed in the internal surface of a sphere at equal intervals, and a surface parallel to the pedestal surface is irradiated with a laser light beam during equal-angular-velocity motion. Consequently, a periodic pulse signal is obtained from said photosensor 5 because the irradiation part 2 is in motion at an equal angular velocity, and the number of pulses is proportional to the tilt angle theta of the pedestal part 1. Consequently, the tilt angle control mechanism part 6 which receives the periodic pulse signal detects the tilt angle theta from the pulse signal and controls the inclination of the pedestal part 1 until a desired tilt angle is obtained. |
