| 摘要 |
PURPOSE:To make it feasible to detect any pinholes around a reticle within a short time by a method wherein, in order to detect the pinholes around a pattern whereon no design data are situated, a region equivalent to the detected width or 1/integer thereof or a little bit larger is projected and irradiated on a senser to detect the pinholes. CONSTITUTION:The regions 1, 2, 3, 4, 5 and 6 respectively representing the regions mentioned as follows are to be detected in pinholes i.e. a region whereon a pattern is actually situated, a region provided for design data, a region containing dicing lines, a region irradiated with a skipper, a region dicing lined, a region to be pinholes free. After finishing the inspection of region 2, the region 6 is inspected by the process other than that for the region 2 utilizing pinhole detecting senser and circuit e.g. by means of irradiating a region 7 at one time and moving the inspecting region (region 7) in the arrow direction to perform the pinhole detection within a short time. Through these procedures, any useless further inspection may be skipped to save the required time if any pinholes exceeding specified numbers are once detected. |
