| 摘要 |
PURPOSE:To facilitate a film forming stage, to increase the yield of production and to prevent deterioration in the magnetic characteristics by forming thin film coils and magnetic cores on a flat substrate having a rear coil embedded in a prescribed groove. CONSTITUTION:The prescribed groove is cut in the substrate 1 of a nonmagnetic body by grinding, and the rear coil 5 is embedded in the groove to make the surface of the substrate 1 flat. Thin film coils 2, 2', a center core 3 and side cores 4, 4' are formed on the substrate 1 to form two closed magnetic paths. Since the center core 3 and the side cores 4, 4' are formed on the same level, the film forming stage is facilitated, and the difference in level is not produced during film formation, so a protective film is not cracked to increase the yield of production. Since the rear coil is formed beforehand, the deterioration in the magnetic characteristics in the vicinity of a gap due to the formation of the coil can be prevented. |
