GAS DETECTOR FOR SEMICONDUCTOR

摘要

PURPOSE:To exclude the use of a dangerous flame or reagent and to simplify operation and maintenance thereof, by converting the concentrated and separated gas for a semiconductor to a chemical kind optically measurable by photochemical reaction and optically analyzing said chemical kind. CONSTITUTION:The sample of the atmosphere containing the gas for a semiconductor is passed through a filter to remove the aerosol therein and passed through the column of a gas chromatograph to adsorb and separate only the gas for the semiconductor. Next, the gas for the semiconductor desorbed by raising the temp. of the GC column is sent to a photochemical reaction chamber by oxygen gas and receives ultraviolet rays from an ultraviolet lamp to be converted to an optically detectable chemical kind. The gas made detectable is sent to a measuring cell made of quartz and irradiated with laser or light from a lamp. The light emitted at this time is converted to a current by a photomultiplier tube through an optical filter while the current is amplified to display concn. on an indicator.