PRODUCTION OF SUBSTRATE FOR MOUNTING THIN FILM HEAD AND PRODUCTION OF THIN FILM MAGNETIC HEAD USING SAID SUBSTRATE

摘要

PURPOSE:To form chips with good workability without deteriorating the characteristics of a head core by providing grooves of a prescribed depth to the parts on a substrate to delineate the chip shape and subjecting the substrate to thin walling. CONSTITUTION:The groove 2 are cut to the peripheral parts on the substrate 1 for mounting thin film magnetic heads where the head chips are to be formed, by which many islands 3 are formed. Magnetic head constituting elements such as magnetic films and magnetic head cores are successively deposited on the islands 3 to form the magnetic heads. The substrate is thereafter subjected to thin walling by dicing so that the chips are formed. No mechanical load is therefore exerted to the thin magnetic films, etc. and the deterioration of the magnetic characteristic is obviated in the stage of dicing the substrate 1 to the chips. The stage for forming the chips is considerably simplified and the chips are obtd. with the good workability.