发明名称 METHOD FOR MEASURING POLARIZED SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To make it possible to simply perform the discrimination of polarity and accurate final measurement by measurement at one place, by discriminating the polarity of an element terminal from the magnitude of a measured capacity value and performing characteristic measurement to predetermined polarity. CONSTITUTION:When an element 1 is positively fed at a constant pitch and stopped at a measuring area B, a measuring terminal 10 is forwardly moved in synchronous relation to said element 1 until contacted with an element terminal 2. Next, bias voltage is applied to the measuring terminal 10 to measure capacity at predetermined frequency and the measured value is compared with a standard value in a measuring circuit 11 and the polarities of the element terminals 2 are discriminated from the magnitude relation of both values. Next, bias voltage is applied to the element terminals 2, 2 with objective polarities to perform the measurement of capacity and the measured value is displayed and recorded on a display and recording apparatus 12. After the completion of measurement, a measuring head 9 is retracted and a transfer roll is rotated by one pitch and the element 1' after measurement is discharged and recovered in a recovery area C.
申请公布号 JPS61118670(A) 申请公布日期 1986.06.05
申请号 JP19840240068 申请日期 1984.11.14
申请人 ROHM CO LTD 发明人 TSUJI KENJI
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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