METHOD AND APPARATUS FOR POSITIONING SUB REFLECTION MIRROR

摘要

PURPOSE:To position the relating position of a sub reflection mirror to a main reflection mirror as a design value by providing an inner pole having a sub reflection mirror receiving ring and an outer pole having a lifting screw slide mechanism for the inner pole and a micrometer for measuring the movement of the inner pole. CONSTITUTION:The positioning device has the outer pole 12 having a flange 10 at one end and a screw slide mechanism for lifting/descending the inner pole 14 at one end, the inner plle 14 slide in the outer pole 12 and having a sub reflection mirror receiving ring 13 attached/detached to/from one end and the micrometer 15 provided near the screw slide mechanism of the outer pole 12 and measuring theposition of the inner pole. Then the inner pole lifting/ descending slide mechanism 11 moves the inner pole by turning a cap nut 17 fitted to a screw 16 provided at one end of the inner pole 14.