| 摘要 |
PURPOSE:To improve the utilizing efficiency of light, by receiving laser light radiated from a laser oscillator by means of a vibrating reflecting mirror and projecting the optical beam obtained by reflecting and expanding the laser light in the shape of a fan at the reflecting mirror to spherical mirrors. CONSTITUTION:Laser light from a laser oscillator 1 is received by a vibrating reflecting mirror 3 and the light repeatedly scanned in a prescribed angle range in the form of a fan by the repeating vibration of the reflecting mirror 3 become an arc-like slit of about 1-4mm in width by the action of spherical mirrors 7 while the light is repeatedly reflected by the spherical mirrors 7 and plane mirrors 8. The arc-like light passing through a photomask 9 is repeatedly reflected among a trapezoidal mirror 10, concave mirror 11, and convex mirror 12 and a photomask pattern is formed on a wafer 13 which is an irradiated body. By simultaneously moving the photomask 9 and wafer 13 in parallel with each other, the photomask pattern is projected over the whole area of a previously designated wafer by a scanning system of 1:1 and the exposure of the arc-like beam is performed. |
