| 摘要 |
PURPOSE:To accomplish a simple construction at a low cost by heating a gas sensor section provided on a substrate with a heater set thereon so that a planar type reducing gas sensor non-reversible in the characteristic will be modified to be reversible. CONSTITUTION:For example, a heater 10 is provided on a base body 1 made of insulating material, a semiconductor or metal while a metal thin film 2, a semiconductor thin film 3 and a metal thin film 4 arranged on the base body 1 are laminated sequentially to form a gas sensor section S. Then, the gas sensor section S is heated up to a proper temperature (e.g. about 100 deg.C) with the heater 10 to be made reversible. This can simplify the construction of the gas sensor S while enabling mass production thereby making the sensor inexpensive. |
