| 摘要 |
PURPOSE:To obtain the high transmitting quantity of X-rays, by forming a mask holding body of a laminated body of aluminium nitride and an organic matter. CONSTITUTION:A mask holding body for X-ray lithography is formed of a laminated body of aluminium nitride and an organic matter. As an example, the mask holding body in the figure is formed of a laminated body of a polyimide film 3 and aluminium nitride film 4 fixed by a ring frame 7 and Si wafer 1. When the mask holding body is constituted in such a way, the relatively high transmitting quantity of X-rays can be obtained even when the mask holding body is made relatively thicker, since the aluminium nitride has a high X-ray transmitting factor. Therefore, the mask holding body can be manufactured easily and excellently. |
