发明名称 SEMICONDUCTOR SUBSTRATE
摘要 <p>PURPOSE:To reduce failures in dicing by arranging a center line in the center of a scribe line. CONSTITUTION:A center line 7 on a scribe region 4 is formed during a photoresist process in manufacturing processes simultaneously. If an edge of a dicer is always moved on the center line 7, the failures in scribing due to a misplacement of the center or the like can be reduced.</p>
申请公布号 JPS61116853(A) 申请公布日期 1986.06.04
申请号 JP19840238934 申请日期 1984.11.13
申请人 YAMAGATA NIPPON DENKI KK 发明人 ONUKI MASAHITO
分类号 H01L21/301;H01L21/78;(IPC1-7):H01L21/78 主分类号 H01L21/301
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