摘要 |
<p>PURPOSE:To reduce failures in dicing by arranging a center line in the center of a scribe line. CONSTITUTION:A center line 7 on a scribe region 4 is formed during a photoresist process in manufacturing processes simultaneously. If an edge of a dicer is always moved on the center line 7, the failures in scribing due to a misplacement of the center or the like can be reduced.</p> |