| 摘要 |
PURPOSE:To stably operate a laser device even if an oscillating velocity is increased by forming a heat sink fin on the back surface of the second electrode and circulating laser gas in the device by a an when opposing the first main electrode and the second main electrode having a plurality of holes with a laser light axial direction as a longitudinal direction to operate the laser device. CONSTITUTION:The first main electrode 9 mounted on a heat exchanger 12 and the second main electrode 8 having many holes are opposed in a laser housing 15, a laser gas flow 18 is circulated in the housing 15 to cool a laser device. In this structure, the electrode 8 is composed of nickel, an auxiliary electrode 10 interposed through a dielectric 11 of the back surface is formed of alumina, and a heat sink fin 20 is secured thereon. A fluid guide 13 which extends is provided in the housing 15 and at one end of the dielectric 11, and gas flow 18 agitated by a fan 14 is strongly blown to between the electrodes and the fin 20. Thus, the electrode 8 and the dielectric 11 are effectively cooled, and even if the repeating vibration velocity is accelerated, the operation can be stabilized. |
