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发明名称
VERFAHREN UND VORRICHTUNG ZUR KONTAKTIERUNG VON HALBISOLIERENDEN HALBLEITERN
摘要
申请公布号
DD236419(A1)
申请公布日期
1986.06.04
申请号
DD19850275380
申请日期
1985.04.22
申请人
VEB SPURENMETALLE FREIBERG,,,,DD
发明人
SIEGEL,WINFRIED,DD;KUEHNEL,GUENTER,DD;FELIX,SOJA,DD
分类号
G01R1/06;G01R31/26;H01L21/66;H01L23/48;(IPC1-7):H01L23/48
主分类号
G01R1/06
代理机构
代理人
主权项
地址
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