| 摘要 |
PURPOSE:To form a sheet coil having a high electric efficiency, by applying ion beams in a plane-vortex pattern onto a conductive film. CONSTITUTION:Pattern coil 2 and 3 are formed by applying Ar<+> ion beams in a vortex pattern onto both surfaces of a thin film 1 of an organic compound by using a focused ion beam irradiation apparatus. In this example, the coils 2 and 3 on both front and back surfaces are provided in correspondence to each other so that the magnetic centers thereof coincide with each other, and the respective inside ends 5 and 6 of the coils are made continuous electroconductively and connected in series to each other through a through hole 4 formed in an insulative portion of the thin film 1. According to this constitution, Ar<+> intrudes into the insulative thin film 1 of the organic compound, and thereby the electroconductive coil portions 2 and 3 are formed as shown in the sectional view of the coils. |
