| 摘要 |
PURPOSE:To facilitate the transportation of a wafer carrier by a method wherein the wafer carrier main body is so constructed as to attracted when required to a handle section provided with a magnet. CONSTITUTION:To a side orthogonally meeting a side panel A of a wafer carrier 10, a metal panel 5 is attached, and the panel 5 is made of a material to be attracted by a magnet. A handle section 20 is prepared to be used for the transportation of the wafer carrier 10. The handle section 20 is constituted of a support 7 containing a magnet capable of attracting the metal panel 5, a switch 9 for magnetizing and demagnetizing the magnet, and a grip 8. For the transportation of the carrier 10, the handle section 20 is caused to approach the metal panel 5, and the switch 9 is turned for a steady contact to be established between the carrier 10 and the handle section 20. |
