Method for the manufacture of a display screen based on thin-film transistors and capacitors

摘要

PCT No. PCT/FR83/00177 Sec. 371 Date May 7, 1984 Sec. 102(e) Date May 7, 1984 PCT Filed Sep. 12, 1983 PCT Pub. No. WO84/01239 PCT Pub. Date Mar. 29, 1984.Method for the manufacture of electronic circuits based on thin-film transistors and capacitors. According to the invention this method comprises the following operations: deposition of a layer (102) of a first transparent, conductive material on an insulating substrate (100), first photogravure applied to the first layer to constitute blocks (106) forming one of the plates of the future capacitors, as well as the sources and drains for the future transistors, deposition of a hydrogenated, amorphous silicon layer (110), deposition of an insulating layer (112), deposition of a layer (114) of a second conductive material and second photogravure applied to the silicon layer-insulating layer-conductive layer assembly in order to define the control grids of the transistors. Application to the construction of display screen control circuits or BBD registers.