| 摘要 |
PURPOSE:To make the manufacturing cost small and enable the obtaining of a uniform signal which depends on the quantity of the received light, by amethod wherein on a monocrystalline semiconductor substrate, read circuits for reading the signals and formed in the arrangement direction of the photo detectors so that they are paired in size, thereby to be integrated. CONSTITUTION:Photo detectors are linearly arranged and formed on the photo detector portion (a) of a monocrystalline semiconductor substrate 1, and on the integrated circuit portion (d) an integrated circuit for processing a signal is formed which includes read circuits arranged in the same size as that of the photo detectors. A source 2a and a drain 2b indicate portions of a read circuit, and they are formed, e.g., by diffusing boron. Then, the photo detectors are linearly arranged and formed laterally of the drawing in a region (b). At this time, an amorphous semiconductor film 7 is used for the semiconductor film of one element constituting a photo detector. In this point, the amorphous semiconductor film 7 may be formed so as to cover the integrated circuit. This will shield the light applied to the integrated circuit, preventing malfunction of the integrated circuit due to light. Further, a light-transmissive electrode 8 constituting a common electrode of one side of a photo detector is not formed on the top of the integrated circuit, but made only on the photo detector forming portion side. |
