发明名称 VACUUM GASEOUS-PHASE GROWTH DEVICE
摘要 PURPOSE:To take out an inner tube without removing a sealing part of an outer tube, etc., by inserting the inner tube into the outer tube to be attached to a furnace, and closing the gap between both the tubes at the front opening part. CONSTITUTION:The inner tube 2 having the leg parts 3 on the surface is inserted into the opening end of the outer tube 1 having opening both ends to be attached to a furnace in such a way that it is freely taken out and inserted, the flange 4 is brought into contact with the opening end of the outer tube. A first closing chamber is engaged through the packing 6 with the peripheral part of the front opening of the tube 1. The first closing chamber 5 consists hermetically of the ring-shaped main body 52 having the water-cooling jacket 51 in it and the freely opening and closing door 53, and the cover 9 as the second closing chamber having the outlet hole 91 for excess gas at the central part is formed in an air-tight state at the rear opening part of the tube 1 through the packing 10.
申请公布号 JPS61111992(A) 申请公布日期 1986.05.30
申请号 JP19840233891 申请日期 1984.11.05
申请人 ROHM CO LTD 发明人 IMAI TOSHIRO
分类号 C30B25/08;C30B23/00;H01L21/205;(IPC1-7):C30B23/00 主分类号 C30B25/08
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