| 摘要 |
PURPOSE:To enhance the detection sensitivity of heat flow, by constituting the titled flowmeter from first and second membrane thermistor elements, each of which is formed by arranging a temp-sensitive resistor film and a pair of electrode membranes to one surface of a flat plate shaped insulating substrate, and mutually soldering the other surfaces of the insulating substrates by titanium. CONSTITUTION:A Ti-foil 9 sandwiched between silver solder materials 8 is arranged between the surfaces 52, 52' of the flat plate shaped insulating substrates 5, 5' of first and second membrane thermistor elements A, B and the whole is heated under vacuum o in inert gas to solder two membrane thermistor elements. In thus formed heat flowmeter, the difference between the front and back surface temps. of the insulating substrates 5, 5' can be detected with high sensitivity. Because the heat flowmeter has temp.-sensitive resistor films 6, 6', the temps. of the insulating substrates 5, 5' can be easily detected by the temp.-sensitive resistor films 6, 6'. Therefore, the thermocouple for measuring the temps. of the insulating substrates is dispensed with in this heat flowmeter. |
