| 摘要 |
<p>PURPOSE:To prevent the injury of a mask and to extend the life of the mask by providing a function to prevent the charge concentration on the mask to a part to be washed thereby eliminating the electrostatic breakdown arising from the charge concentration. CONSTITUTION:The optical mask 1 is placed on a holder 5 and is rotated; at the same time, high-pressure pure water is ejected from a nozzle 4 to wash the mask 1. The static electricity generated by friction with the high-pressure pure water is neutralized and removed by an ionizing blower 6. the electrostatic breakdown by corona discharge is thus eliminated. The recombination of ion arises if the pressure of the blower 6 is too high and therefore the blower is operated with the adequate pressure. The ionizing blower which does not generate ozone and is provided with a filter is used to prevent the side effect of an ionizer.</p> |
