发明名称 DIE BONDING DEVICE
摘要 PURPOSE:To eliminate the timing lag of the vertical movement of a suction nozzle and the vertical movement of a push-up needle, and to separate a die excellently by synchronously turning a driving motor for the push-up needle vertically moving the push-up needle and a driving motor for the suction nozzle vertically shifting the suction nozzle. CONSTITUTION:A driving motor 31 for a push-up needle vertically moving the push-up needle 4 and a driving motor 23 for a suction nozzle vertically shifting the suction nozzle 1 are provided, and the driving motors 31, 33 using two pulse motors or AC servomotors or the like are synchronized and turned. Accordingly, the timing lag of the vertical movement of the suction nozzle 1 and the vertical movement of the push-up needle 4 is eliminated, thus excellently separating a die. The alteration of the position of die bonding and multi- bonding and the like are conducted easily.
申请公布号 JPS61112335(A) 申请公布日期 1986.05.30
申请号 JP19840233354 申请日期 1984.11.07
申请人 SHINKAWA LTD 发明人 YAMAZAKI NOBUHITO;SUGIURA KAZUO
分类号 H01L21/52;H01L21/58;(IPC1-7):H01L21/58 主分类号 H01L21/52
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