| 摘要 |
<p>PURPOSE:To correct the deviation of the position of a trimming starting point accompanied by printing deviation and alignment deviation, by computing the amount of deviation between the actual position of the starting of change in characteristic values of a specified element and a predicted position, and correcting the position, to which a laser beam is projected, by the computed amount of deviation. CONSTITUTION:A scanning mechanism 3 is provided with a reflecting mirror, whose rotary angle is changed in correspondence with a position coordinate signal P from a control circuit 1. The projected position of a laser beam on a substrate from a laser light source 2 is changed. A measuring circuit 5 measures the resistance values of a plurality of resistors on the substrate B and supplies the results to the control circuit 1 and an edge detecting circuit 6. The control circuit 1 controls the projected position of the laser beam so that said measured values become the values specified by program. Meanwhile, the edge detecting circuit 6 detects the edge of the specified resistor, based on the change in measured value received from the measuring circuit 5. The result is sent to the control device 1.</p> |
