| 摘要 |
PURPOSE:To form the inspector for the title device which can vary the strength of alpha-ray energy, by a method wherein a moderator film is arranged in the alpha-ray path. CONSTITUTION:A holder 13 holds a semiconductor chip 13A to be inspected, and a holder 15 attachably and detachably holds the moderator film 15A in the alpha-ray path between an alpha-ray source 12 and a chip 13A. The moderator film 15A can easily vary the energy of alpha-ray incidence to the surface of the chip 13A by suitably changing one or more of its thickness, number of pieces, and quality. An action judgement unit 16 enables the action of circuit elements in the chip 13A and judges whether the action is right or not. An alpha-ray energy measurement unit 17 measures the strength of alpha-ray energy incident to the surface of the chip 13A on the basis of the output signal of an alpha-ray detection element 14. Besides, this inspector elongates the range of alpha particles by providing a vacuum chamber 10. Since the alpha-ray energy can be thus easily varied, the test of strength to alpha rays and the like can be efficiently carried out in the production field, etc. |
