| 摘要 |
PURPOSE:To reduce a repair process and to reinforce a gap by forming a thin film of a titanium group material previously on the 1st insulating layer where the magnetic gap is expected to be formed, and then forming the 2nd insulating layer and a ferromagnetic material thin film. CONSTITUTION:A conductive coil pattern 12 and the 1st insulating layer 11 formed of an SiO2 film, etc., are formed on an Mn-Zn single-crystal ferrite substrate 10 as a lower core. Then, the thin film of the titanium group material is formed on the 1st insulating layer 11 where the magnetic gap is to be formed, and then the upper core consisting of the 2nd insulating layer 13 and ferromagnetic material thin film 15 is formed. Consequently, it is not necessary to form the upper core after the 1st insulating layer 11 is removed temporarily like before, and the repair process is reduced. Further, the gap is reinforced because the titanium group thin film 14 is interposed. |
