METHOD OF CARRYING SEMICONDUCTOR SUBSTRATE,申请号JP19840232858-传众专利搜索

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发明名称	METHOD OF CARRYING SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPS61110664(A)	申请公布日期	1986.05.28
申请号	JP19840232858	申请日期	1984.11.05
申请人	HITACHI LTD	发明人	KOBARI TOSHIAKI;KANBARA HIDEAKI;MIZUMOTO MUNEO;UEDA SHINJIRO
分类号	B61J3/02;B65G47/52	主分类号	B61J3/02
代理机构		代理人
主权项
地址

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