| 摘要 |
PURPOSE:To directly measure an internal termperature for direct control by utilizing a diode circuit formed within a pellet of semiconductor device. CONSTITUTION:A semiconductor device 1 is transferred on a transfer rail 6. Under this condition, the semiconductor device 1 is once stopped and the pin contact members 3a, 3b are placed in contact with the pins 2a, 2b of semiconductor device. A constant voltage is applied to a diode formed to the pellet 1b of semiconductor device 1 through such pin contact members 3a, 3b, a current flowing in this case is detected. It is compared with the linear characteristic line and thereby it is directly controlled whether pellet temperature in the semiconductor device 1 is under the setting temperature condition or not. In this case, the linear relation between voltage and temperature is obtained for each kind of semiconductor device 1 as the reference data and it is then stored in a memory device 9. |
