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发明名称
CONVEYOR FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPS61109688(A)
申请公布日期
1986.05.28
申请号
JP19840230398
申请日期
1984.11.02
申请人
CANON INC
发明人
SATO TERUYA
分类号
H01L21/683;B25J15/00;B25J15/06;B65G49/07;H01L21/67;H01L21/68
主分类号
H01L21/683
代理机构
代理人
主权项
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