| 摘要 |
PURPOSE:To obtain a goniometer having high accuracy without using a mechanism having high accuracy by driving a fine adjusting mechanism for correcting errors by a piezo-electric element. CONSTITUTION:A detector holding arm 7 of the goniometer is mechanismically connected to a theta driving shaft so that the arm rotates by as much as twice the rotating angle of the theta driving shaft. The lower part of a sample holder 2 is a circular cylindrical part 2a coaxial with the theta driving shaft 1 and is fitted to a cylindrical sleeve 4 in a tight slide fitting state. The holder 2 is made rotatable within the range of the elastic torsion of a leaf spring 3. A base 5 is formed to the sleeve 4 and the rear end of the piezo-electric element 6 having the expanding and contracting direction in the direction tangential to the outside surface of the part 2a in fixed and rear end thereof is kept always in slight contact with the attaching step surface 16 of the spring 3 of the sample holder. The piezo-electric element expands and presses further the one side of the spring 3 when a voltage is impressed thereto. The spring 3 is therefore twisted by receiving the torsional torque by which the holder 2 is rotated at a slight angle with the shaft 1 to correct the error of the rotating angle of the shaft 1. |
