Method of fabricating low noise reference diodes and transistors

摘要

The thick oxide over the surface portion of a P/N junction of a reference diode is removed, a thin oxide is grown thereon, and a contaminated shield layer is formed on the thin oxide. In addition to improving the reversed biased diode, the same method improves the forward biased emitter-base surface junction of a vertical bipolar transistor. The shield layer may be biased separate from the transistor.