| 摘要 |
PURPOSE:To integrate the position and direction of grating grooves under required state without optical assembling adjustment by forming a reference surface or a reference line in parallel with the grating grooves and separated from the grating grooves by a prescribed distance on a part of a substrate. CONSTITUTION:The reference surface 13 formed on the side part of a replica substrate 10 is rectangular to a surface 12 and parallel with the grating grooves 11 and is separated from the endmost grating groove 11a by a distance (a). Since the grating groves 11 are arranged in the prescribed positions and direc tion to the reference surface 13 in the diffraction grating, the diffraction grating can be correctly integrated into a spectral device only by mechanical working and assembling accuracy when the diffraction grating is integrated into the spectral device under the state that the reference surface 13 is abutted on the reference surface of the spectral device.
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