| 摘要 |
PURPOSE:To increase cooling effect and thereby miniaturize an electromagnetic lens by filling spaces among windings of a coil for an electromagnetic lens for use in an electron beam microanalyzer, etc., with metal of a low melting point and thereby improving thermal conductivity. CONSTITUTION:An electromagnetic lens for use in an electron beam microanalyzer, etc., is formed by winding a wire 2 having an insulator coating 5 such as polyimide series enamel, etc., in a yoke 3, and fitting a cooling cylinder 6 having a cooling water tube 4 burried therein to the outer periphery of the yoke 3. A filling material 7 comprising low melting point metal such as indium, etc., is injected into the yoke 2, and spaces among windings 2 are filled with a filling material 7, whereby thermal conductivity of an electromagnetic lens is improved because of a property of the lens being a lump of continuous metal so formed. Accordingly, cooling effect by cooling water is greatly improved to permit the electromagnetic lens to be miniaturized, whereby a reflection electron detector can be brought for installation more closely to the sample for improving sensitivity. |
