| 摘要 |
PURPOSE:To decrease detecting noise by forming a quadruple electrode mass spectrograph using inductive coupling plasma as an ion source by arranging an optical absorber in a location in which ion beams are separated from an optical extension line by deflection. CONSTITUTION:A quadruple electrode mass spectrograph consists of inductive coupling plasma 2 used as an ion source, a sampling part 6, a lens system 36, an analytical part 14 having guadruple electrodes 16, a deflection part 38 and a detector 18. Ion beams 20 are deflected from a center axis in the deflection part 38, and introduced into the detector 18 as beams 24 to detect them. A optical absorber 44 comprising black alumite are arranged on the center axis in the rear part of an electrode 30 of the deflection part 38 to absorb light which goes straight on. Since only ion beams 24 are introduced to the detector 18 and detected there without decrease in sensitivity, background noise caused by light scattering can be eliminated. |
