| 摘要 |
<p>PURPOSE:To stabilize the light output and to integrate a device, by providing a photo-sensor on one of the light outputting faces of a plane light-emitting diode so that the stabilization is obtained with feedback from the photosensor. CONSTITUTION:A laser 2 comprising compound semiconductor layers deposited on a substrate 1 on a compound semiconductor of III-V groups is covered with a dielectric multilayer film 3 to form a laser array. The dielectric multilayer film 3 has an effect of improving the reflectivity. On the other hand, a semicon ductor substrate 11 is provided with an avalanche photo-diode as a photo-sensor 12, which is laminated to the laser 2 in a one-to-one correspondence. Light outputted from the laser 2 and transmitted by the reflection film 3 is received by the sensor 12, which in turn negatively feeds it back to a laser drive circuit so as to control and stabilize the laser output. Such the plane light-emitting laser may be obtained, for example, by a method in which an N type InP film 22, a GaInAsP film 23 and a P type InP film 24 are layered on an N type InP substrate 21, an SiO2 film 25 is provided in a predetermined shape, and metallic electrodes 26 and 28 are attached to both the sides. As the photosensor, a Ge avalanche diode or the like is used.</p> |
