| 摘要 |
PURPOSE:To prevent not only the outflow of generated mist but also the corrosion of a dillution chamber, by forcibly recirculating the diluted acid, which was diluted by an acid dilution apparatus provided with an absorbing chamber, a dilution chamber and a cooling part, to cool said diluted acid by an external heat exchanger before returning the same to the acid dilution chamber. CONSTITUTION:The diluted acid diluted by an acid dilution apparatus 13 is sucked from a cooling part 8 by forcible recirculation by the operation of a pump 16 and cooled by a heat exchanger 17 through a tank 14 to be again returned to the absorbing chamber cover 4 of the acid dilution apparatus 13. The diluted solution diluted to predetermined concn. is finally taken out from the outlet part 14a provided to the tank 14. By this method, because the diluted acid cooled in the outside can be again sent to the acid dilution apparatus 13 even if the concn. of dilute acid is adjusted to 50% or more, the outflow of generated mist can be prevented. A heat transfer property is enhanced and a cooling area can be reduced. |
