| 摘要 |
PURPOSE:To obtain a titled device for realizing a long life of a monitor use window glass by attaching an adhesion preventing window plate consisting of a penetrating ceramic to the vicinity of the inner wall of the monitor use window glass which has been fitted into a part of the side wall of a chamber. CONSTITUTION:In a gas phase coating device which has placed a covering use substrate 12 and a crucible 13 containing an evaporation source and has provided a high frequency coil 21, in a chamber 11, a monitor use window glass 14 which can observe the inside with eyes 15 is fitted into a part of the side wall of the chamber 11, and an adhesion preventing window plate 17 consisting of a penetrating ceramic and a shutter 19 are attached to the vicinity of its inside wall. The adhesion preventing window 17 is constituted of a quartz glass or a sapphire desirably, and it is desirable to prevent the growth of a coating film by installing a heater 18 and heating it to a temperature of about 1-1.5 times of a melting point of the evaporation source. In this way, an adhe sion of the evaporation source to the window glass 14 is prevented, and it can be used extending over a long period of time. |
