| 摘要 |
PURPOSE:To regenerate efficiently a spent etching soln. with an inexpensive apparatus by charging the etching soln. into the regeneration tank together with hydrochloric acid and by heating the mixed soln. to a specified temp. while blowing an oxidizing gas. CONSTITUTION:An etching soln. contg. ferrous ions is charged into the regeneration tank 1 packed with a filler 2, and the proper amount of hydrochloric acid is fed from a feeding pipe 4. The oxidizing gas scontg. O2 such as air or oxygen is blown into the mixed soln. 3 from a blowing pipe 5 to stir the soln. 3. At the same time, the soln. 3 is heated to 60-95 deg.C with a heater 6 to accelerate a reaction. By such a method, the efficiency of the regeneration of the etching soln. is increased almost without requiring a capital investment for equipment. |
