| 摘要 |
PURPOSE:To obtain a highly efficient element for high frequency by a method wherein metallic fine particles, each having the diameter of 0.1mum or less, are regularly arrayed on the substrate. CONSTITUTION:As the material for the substrate quartz is used and as the material for the evaporating substance platinum, a platinum alloy or metallic fine particle of Nb or Pb which indicates a superconductivity at low temperatures is used. In a formation of the element, firstly, a finely narrowed electron beam is irradiated on the substrate in a high vacuum while the electron beam is scanned in a stripe form. Then, an electron beam is irradiated on the same parts as those irradiated on the substrate while the electron beam is scanned in a stripe form in a rectangular direction to the foregoing scanning direction. After then, 0.1-mum or less diameter substances, of which fine particles are formed on the substrate, are thinly evaporated on the substrate. The substances are heated at proper temperatures, the fine particles are arrayed on the substrate in a lattice type and the element is completed. It is generally desirably that the evaporation quantity is 20Angstrom -500Angstrom and the heating temperature is 30 deg.C-1,000 deg.C. This element for high frequency indicates a remarkably favorable nature in both of the detection characteristics for high frequency and the oscillation characteristics, because the junction between the fine particles to form the diode is uniform. |
