| 摘要 |
PURPOSE:To enable to feed and recover substrates automatically by reducing their conveying distance by a method wherein the conveying path between a substrate position controlling stage and a substrate treatment device is used as the common path for feeding and recovering of the substrate. CONSTITUTION:A plurality of cassette stages 22A-22D, on which a cassette 7 whereon a plurality of substrates A are housed is placed, and substrate conveying mechanisms 40a-40g with which the substrates A are conveyed from the cassette 7 to a substrate treatment device 1 in an almost horizontal position and the substrates A are returned to the cassette 7 from the substrate treatment device 1, are provided on an autoloader 20. A substrate position controlling stage 30, wherein the substrates A to be sent to the substrate treatment device 1 are placed in the allowable range of position in their progressing direction, and a substrate counter with which the number of substrates A sent in and sent out is counted, are provided in the midway of the substrate conveying path. Accordingly, as the substrate conveying mechanmism and the processed substrates are sent back to the cassette, and cassette can be arranged at one place, thereby enabling to make short the conveying path.
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